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PI has developed a small XYZ Nanopositioning Stage based on air-bearing guide technology and voice coil direct-drive linear motors. In addition, PI has presented a high-speed photonics alignment system with the help of the same mechanics plus advanced alignment algorithms functioning on an ACS controller. Motor Bearings
The small 3-axis nanopositioning stage relies on PI’s A-142, miniature air-bearing slide, and is ideal for high-dynamics positioning, high-accuracy, scanning and alignment applications in optics, semiconductors, photonics, etc.
Depending on a highly dynamic frictionless and wear-free precision motion system, this multi-axis linear translation stage performs well with 10 mm XYZ travel and a compact footprint of just 80 × 90 mm.
The Z-axis consists of a combined counterbalance to redress for gravitation forces and improve the dynamics and performance of the Z-axis motor. The XYZ nanopositioning stage has combined linear encoders with a resolution of 5 nm.
For industrial automation and research applications, PI offers various motorized XYZ precision positioning stages with several motor and drive options. For the highest accuracy and performance, closed-loop, piezoelectric, flexure-guided 3-Axis nanopositioning stages are suggested with shorter travel ranges.
An A-142-based, high-speed XYZ photonics alignment system, as shown at the 2023 Photonics West conference. The frictionless 3-axis air bearing stage is operated by an advanced ACS motion controller with on-board advanced search and alignment algorithms for fiber optics and similar applications. Video Credit: PI (Physik Instrumente) LP
XYZ nanopositioning stage – compact 3-axis high-dynamics motion system based on the A-142 air-bearing linear slide. The Z-axis has an integrated counterbalance to offset the weight force of the moving table and load. Image Credit: PI (Physik Instrumente) LP
XYZ-Nanopositioning Stage with air bearings for high-dynamics, 24/7 high-duty cycle applications in automation, manufacturing, test & metrology, scanning, and alignment. Air bearings do not generate particles and are compatible with cleanroom manufacturing. Video Credit: PI (Physik Instrumente) LP
The A-142 single-axis air-bearing linear slide is the basis for the XYZ nanopositioning stages. This miniature linear nanopositioning stage boasts several highly competitive specifications: 10 mm travel range, 3 kg load capacity, 450 mm/sec max velocity, and up to 2 g acceleration. It features an integrated frictionless, direct-drive voice-coil linear motor and a linear encoder. Image Credit: PI (Physik Instrumente) LP
A-341 Hybrid XY/XYZ Gantry Positioning System
A-352 Large Overhead XY/XYZ Gantry Positioning System for Precision Automation
A-523: Fast 3-DOF Z-Tip-Tilt Module for Alignment Automation
A-62x PIglide RM Rotation Stage with Air Bearings and Closed-Loop Encoder from PI
A-811: High Performance Motion Control With EtherCat Connectivity
A-828: High Performance Motion Controller
ES-100 Precision Vertical Elevation Stage with Closed Loop Motor from PI micos
H-820 Low-Cost Hexapod Parallel-Kinematics 6 Axis Positioning System from Physik Instrumente
H-840: 6-Axis Robotics Hexapod Stewart Platform
H-850K Parallel Kinematics Hexapod Precision Positioning System for Ultra-High Load from Physik Instrumente
High-Speed Automated Photonics Alignment System F-712 FMPA by PI
L-239 Motorized Precision Linear Actuator with Closed-Loop Motor from PI micos
L-310 Precision Vertical Elevation Stage with Closed Loop Motor from PI
L-412 and L-417 High-Load Linear Stage Family for Industrial Precision Automation and Motion Control
L-417: High Force Linear Translation Stage for Precision Automation
L-511 Motorized Precision Linear Positioner from PI
L-731/V-731 Planar XY-Precision Linear Stages for Industrial Automation from PI
L-836: Compact Linear Translation Stages
Linear Motor Actuator for Automation, Voice Coil Drive-V-273 from PI
Low-Cost Piezo Flexure Linear Actuator - P-603 from PI
Low-Profile High-Speed Stage with Ultrasonic Piezo Linear Drives & Direct Position Measurement
LPS-45 Miniature Linear Piezo Positioning Stage from PI micos
LPS-65 Precision Linear Piezo Positioning Stage from PI micos
M-110: Ultra Compact Micro-Translation Stage
M-116 Precision Miniature Motorized Rotation Stage from Physik Instrumente
M-122 Miniaturized Precision Linear Positioning Stage with Linear Encoder from Physik Instrumente
M-687 XY Motorized Microscope Stage with High Precision Closed Loop Piezo Motor from Physik Instrumente
M-811 Compact Vacuum Compatible Parallel-Kinematics 6-Axis Hexapod Stewart Platform
M-850K Hexapod Precision Positioner for Astronomy and Outdoor Operation from Physik Instrumente
Manual Precision XY Microscope Stage, M-545.2M from PI
MCS XY-Precision Linear Positioner for Metrology from PI micos
N-470 PiezoMike Nanopositioning Motor Actuator from Physics Instruments
P-131: Programmable, Active Shims for Optical Fine Alignment
P-725KHDS PIFOC® High Dynamics Objective Lens Scanner from Physik Instrumente
P-876: Flexible Piezo Transducer for Sensing and Actuation
P-911K UHV-Compatible Miniature Piezo Hexapod Technology Demonstrator from Physik Instrumente
PI M-228 Cost Efficient Stepper Motor Actuators
PI M-403 Low Cost Precision Linear Stages
PI P-545 PInano™ XYZ Piezo Stages for Super-Resolution Microscopy
PI P-736 PInano™ Z, Piezo-Z Slide Scanner
PI U-651 Ultra-Low Profile Rotation Stage with Ultrasonic Motor
Piezo Assemblies for Nano-Dosing, Micro Pumps and Valves in Medical Engineering
Piezo Linear Nanopositioning Motor - N-216 NEXLINE® from PI
PIFOC® Long Travel Piezo Microscope Lens Positioner from Physik Instrumente
PLS-85 Vacuum Precision Linear Positioner from PI micos
Precision Rotation Stage - Low Profile, Air Bearings, Direct Drive
Programmable Shims - Nanometer Precision - PIRest
PRS-200 Precision Motorized Large Aperture Rotation Stage from PI Micos
Q-545 Miniature Linear Piezo Positioning Stage from PI
U-628 Miniature, High Speed, Closed-Loop Rotary Stage from Physik Instrumente
UHV Vacuum Nanopositioning Stage from Physics Instruments
Ultra-High Accuracy Nano-Positioning Linear Stage with Linear Motor-N 565 from PI
Ultra-High Accuracy Nano-Positioning Linear Stage with Linear Motor-N 664 from PI
UPR-270 Air: Rotation Stage with Ultra-High Precision Air Bearings and Closed-Loop Angular Encoder from PI micos
V-308: Fast Focus Nanopositioning Stage for Surface Metrology and Microscopy
V-508: Low Profile Linear Translation Stages
V-551 Precision Linear Motor Stage with Absolute Encoder and 0.5nm Minimum Incremental Option from PI
V-610: Compact, Fast Rotary Table for Precision Test and Manufacture
V-622: Fast Precision Rotary Stages with Industrial Performance, Direct-Drive, and Ball Bearings
V-817: High-Load Linear Translation Stage with Linear Motors for High-Speed Precision Automation
V-855: High-Speed, Direct-Drive Linear Modules for Industrial Precision Automation
V-857: Fast, Long-Travel Linear Modules for Industrial Precision Automation
V-931: Fast Steering Mirror for Laser Optical Communication and Laser Beam Control
Vacuum Nanopositioning Stages - P-915 from PI
WT-90 Precision Motorized Goniometer Cradle from PI micos
X-417: Granit-Based XYZ Motion and Positioning System for Laser Machining
XY Motorized Microscope Stage, M-545 from PI
XYZ Positioning Stage System for Fiber Alignment and Photonics Alignment - F-131 from PI
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